Polishing composition and polishing method employing it

Details Polishing composition and polishing method employing it Polishing composition and polishing method employing it

1999-12-01

2000-10-31

Delcotto, Gregory R.

Etching a substrate: processes

Nongaseous phase etching of substrate

Using film of etchant between a stationary surface and a...

216 99, 216106, 134 13, 510398, 510507, 510511, 252 791, C23F 118, C23F 130

Patent

active

061397636

ABSTRACT:
A polishing composition comprising the following components:

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patent: 5736495 (1998-04-01), Bolkan et al.
patent: 5770095 (1998-06-01), Sasaki et al.
patent: 5897375 (1999-04-01), Watts et al.
patent: 5980775 (1999-11-01), Grumbine et al.
patent: 5993686 (1999-11-01), Streinz et al.
patent: 6001730 (1999-12-01), Farkas et al.

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