Polishing composition

Details Polishing composition Polishing composition

1997-10-14

2000-02-22

Koslow, Melissa

Compositions: coating or plastic

Coating or plastic compositions

Polishes

51307, 51308, 438692, 438693, C09K 314, B24B 100

Patent

active

060275545

ABSTRACT:
A polishing composition comprising silicon nitride fine powder, water and an acid.

REFERENCES:
patent: 4057939 (1977-11-01), Basi
patent: 5084071 (1992-01-01), Neadic et al.
patent: 5354490 (1994-10-01), Yu et al.
patent: 5525191 (1996-06-01), Maniar et al.
patent: 5527423 (1996-06-01), Neville et al.
Metals Handbook, 9th ed, vol. 9, pp. 35 and 39-40, Sep. 2, 1982.
JP5-231602 -Abstract -917193
JP6-2057470 -Abstract -613185
DE4314310 -Abstract -4130193

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