Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2007-03-13
2007-03-13
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S533000
Reexamination Certificate
active
11002655
ABSTRACT:
The polishing body is attached to a substrates. The polishing body has a structure in which a polishing pad, a hard elastic member and a soft members are laminated in that order from the side of the polishing surface. For example, an IC1000 (commercial name) manufactured by Rodel, Inc. is used as the polishing pad. For example, a stainless steel plate is used as the hard elastic member. A Suba400 (commercial name) manufactured by Rodel, Inc. is used as the soft members. The polishing pad6has grooves in the polishing surface side. The residual thickness d of the areas of the grooves in the polishing pad is set so as to satisfy the condition 0 mm<d≦0.6 mm. As a result, the ability to eliminate steps can be increased, thus allowing the “local pattern flatness” to be improved, while ensuring the “global removal uniformity”; furthermore, a polishing body with a long useful life can be obtained.
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Hoshino Susumu
Sugaya Isao
Ackun Jr. Jacob K.
Morgan & Lewis & Bockius, LLP
Nikon Corporation
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