Polishing apparatus with support columns supporting multiple pla

Details Polishing apparatus with support columns supporting multiple pla Polishing apparatus with support columns supporting multiple pla

1997-09-19

1999-09-28

Eley, Timothy V.

Abrading

Machine

Rotary tool

451269, 451342, B24B 704

Patent

active

059577630

ABSTRACT:
A polishing machine includes a platform assembly slidably mounted on three support columns. The platform assembly includes first and second platforms captively joined together so as to be slidably movable toward and away from each other. A lift plate is supported above the uppermost platform by a coil spring and an upper polish plate is suspended from the lift plate by a supporting element which passes through the platform assembly. Drive shafts are suspended from an overlying superstructure and engage the upper platform so as to selectively raise and lower the platform assembly and the upper polish plate. The spring allows adjustment of the pressure applied by the upper polish plate.

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SpeedFam-Spitfire Brochure entitled "Double-Sided Abrasive Machining System 360", Copyright 1994.

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