Polishing apparatus with improved alignment of polishing plates

Details Polishing apparatus with improved alignment of polishing plates Polishing apparatus with improved alignment of polishing plates

1998-06-18

2000-09-05

Scherbel, David A.

Abrading

Machine

Rotary tool

451261, 451286, 451288, 451269, B24B 700

Patent

active

061134783

ABSTRACT:
In a polishing machine for simultaneous double-sided polishing of workpieces between upper and lower polish tables, the upper polish table has a hollow center telescopically receiving in a drive hub supported from below. The upper polish plate is suspended by a lifting rod from a double-ended main lifting cylinder having upper and lower ends secured to a frame extending from the lower polish table.

REFERENCES:
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patent: 4707945 (1987-11-01), Arai
patent: 4860498 (1989-08-01), Gosis
patent: 5099614 (1992-03-01), Arai et al.
patent: 5595529 (1997-01-01), Cesna et al.
patent: 5944591 (1999-08-01), Chen
SpeedFam-Spitfire Brochure entitled "Double-Sided Abrasive Machining System 360", Copyright 1994.
SpeedFam Brochure entitled "SpeedFam.RTM. Double-Sided Abrasive Machines".

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