Polishing apparatus, polishing method, control program for...

Details Polishing apparatus, polishing method, control program for... Polishing apparatus, polishing method, control program for...

2005-05-03

2005-05-03

Wilson, Lee D. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S038000, C451S048000, C451S075000, C076S108600

Reexamination Certificate

active

06887125

ABSTRACT:
A polishing apparatus includes a table on which a polishing target member is placed, and at least one nozzle which sprays a polishing solution to a surface of the polishing target member so as to form, by polishing, the surface of the polishing target member. The nozzle and the polishing target member move relative to each other, and an angle of the nozzle is changeable.

REFERENCES:
patent: 5636558 (1997-06-01), Sanders et al.
patent: 5709587 (1998-01-01), Shaffer
patent: 5759086 (1998-06-01), Klingel
patent: 5791968 (1998-08-01), Matsumura et al.
patent: 5910338 (1999-06-01), Donde
patent: 5951369 (1999-09-01), Kordonski et al.
patent: 5971835 (1999-10-01), Kordonski et al.
patent: 6168502 (2001-01-01), Allman et al.
patent: 6244934 (2001-06-01), Miyai et al.
patent: 6305261 (2001-10-01), Romanini
patent: 6733369 (2004-05-01), Stacklies et al.
patent: 26 07 097 (1977-08-01), None
patent: 3-136769 (1991-06-01), None
patent: 05-057591 (1993-03-01), None
patent: 05-771151 (1993-03-01), None
patent: 05-201737 (1993-08-01), None
patent: 5-253841 (1993-10-01), None
patent: 05-277975 (1993-10-01), None
patent: 2000-127044 (2000-05-01), None
patent: 2000-320792 (2000-11-01), None
patent: 2001-92514 (2001-04-01), None

Affiliated with

Also associated with

Rating

Polishing apparatus, polishing method, control program for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus, polishing method, control program for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus, polishing method, control program for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3433848