Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2007-02-13
2007-02-13
Hail, III, Joseph J. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S285000, C451S287000, C451S398000
Reexamination Certificate
active
11290815
ABSTRACT:
The present invention provides a polishing apparatus for a semiconductor wafer in which a slide member and a swing holding member are provided in a polishing member that is provided so as to block an opening in a head housing, a slide guide member and a ring member are provided in the head housing, the ring member surrounds the periphery of the polishing member positioned in the head housing such that a predetermined clearance is formed between the ring member and the outer peripheral portion of the polishing member, and the polishing member is constituted to be capable of a reciprocating motion using air that is supplied into and discharged from the head housing. By means of this constitution, the present invention provides a polishing apparatus in which the linearity between a polishing thrust and air pressure in the head housing is increased.
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Morgan & Lewis & Bockius, LLP
Nikon Corporation
Scruggs Robert
LandOfFree
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