Polishing apparatus including turntable with polishing surface o

Details Polishing apparatus including turntable with polishing surface o Polishing apparatus including turntable with polishing surface o

1996-01-24

1999-03-30

Eleg, Timothy V.

Abrading

Machine

Rotary tool

451288, 451495, 451527, B24B 2902

Patent

active

058881263

ABSTRACT:
A polishing apparatus includes a turntable with an abrasive cloth mounted on an upper surface thereof, and a top ring disposed above the turntable for supporting a workpiece to be polished and pressing the workpiece against the abrasive cloth under a predetermined pressure. The turntable and the top ring are movable relatively to each other to polish a surface of the workpiece supported by the top ring with the abrasive cloth. The abrasive cloth has a projecting region on a surface thereof for more intensive contact with the workpiece than other surface regions of the abrasive cloth. The projecting region has a smaller dimension in a radial direction of the turntable than a diameter of the workpiece when the projecting region is held in contact with the workpiece. A position of the projecting region is determined on the basis of an area in which the projecting region acts on the workpiece.

REFERENCES:
patent: 3603042 (1971-09-01), Boettcher
patent: 5081795 (1992-01-01), Tanaka et al.
patent: 5212910 (1993-05-01), Breivogel et al.
patent: 5216843 (1993-06-01), Breivogel et al.
patent: 5297364 (1994-03-01), Tuttle
patent: 5435772 (1995-07-01), Yu
patent: 5558563 (1996-09-01), Cote et al.
patent: 5562529 (1996-10-01), Kishii et al.
patent: 5564965 (1996-10-01), Tanaka et al.

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