Polishing apparatus having robotic transport apparatus

Details Polishing apparatus having robotic transport apparatus Polishing apparatus having robotic transport apparatus

1997-02-28

1999-04-13

Eley, Timothy V.

Abrading

Machine

Combined

451339, 451914, B24B 706

Patent

active

058937943

ABSTRACT:
A robotic transport apparatus is capable of providing an effective waterproofing function of working components without using mechanical seals. The robotic transport apparatus includes a robot body, an arm assembly extendably attached to the robot body, and a workpiece holding section attached to the arm assembly. A pan member for waterproofing of the robot body is provided above the robot body and has an area not smaller than the workpiece holding section.

REFERENCES:
patent: 3841028 (1974-10-01), Katzke
patent: 4002246 (1977-01-01), Brandt et al.
patent: 5174067 (1992-12-01), Hasegawa et al.
patent: 5653624 (1997-08-01), Ishikawa et al.
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5676590 (1997-10-01), Hiraoka
patent: 5679055 (1997-10-01), Green et al.

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