Polishing apparatus having endpoint detection device

Details Polishing apparatus having endpoint detection device Polishing apparatus having endpoint detection device

1995-12-22

1997-09-30

Smith, James G.

Abrading

Precision device or process - or with condition responsive...

By optical sensor

451288, 451287, 451 42, B24B 4900, B24B 5100

Patent

active

056720912

ABSTRACT:
A polishing apparatus has an automated endpoint detection device to determine if an endpoint of polishing has been reached without removing the wafer from a top ring of the polishing apparatus. When a pre-determined inspection time is reached in a process of polishing, the wafer is moved laterally along the turntable and the current surface condition of the wafer is determined by comparing the current surface condition with an initial surface condition, having an oxide film for example, determined from surface reflection measurement data carried out opto-electronically on the wafer before polishing. The endpoint detection device can be used to remove the surface oxide film so that the apex of the underlying device elements are just exposed. By eliminating the need for removing the wafer from the top ring for inspection, the cost of handling the wafer for polishing is reduced significantly, and enables reduction in the cost of manufactured devices. The endpoint determination device is applicable to any type of flat objects, such as LCD panels, requiring a high degree of polishing precision.

REFERENCES:
patent: 4956944 (1990-09-01), Ando et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5222329 (1993-06-01), Yu
patent: 5245794 (1993-09-01), Salugsugan
patent: 5308438 (1994-05-01), Cote et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5492594 (1996-02-01), Burke et al.

Affiliated with

Also associated with

Rating

Polishing apparatus having endpoint detection device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus having endpoint detection device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus having endpoint detection device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2253534