Polishing apparatus and polishing method using the same

Details Polishing apparatus and polishing method using the same Polishing apparatus and polishing method using the same

1996-10-11

1999-01-19

Rose, Robert A.

Abrading

Abrading process

Glass or stone abrading

451287, 451505, B24B 722

Patent

active

058608516

ABSTRACT:
A polishing apparatus and a polishing method using the apparatus in which an elastic portion is interposed between a polishing table and a polishing cloth, whereby the contacting state between the face of the polishing cloth and a face of a sample to be polished is made uniform and the flatness of the sample is improved. A polishing apparatus and a polishing method using the apparatus in which a second elastic body having on a sample-contacting face resin pellets and/or polishing particles is used in a polishing cloth, whereby the degree of the polishing on a face of a sample to be polished is uniformalized in a macroscopic view point and the flatness is improved in a microscopic view point. A polishing apparatus and a polishing method using the apparatus in which a second elastic body having convex portions, concave portions or groove portions formed on a sample-contacting face is used in a polishing cloth, whereby the degree of the polishing on a face of a sample to be polished is uniformalized in a macroscopic view point and the flatness is improved in a microscopic view point. A polishing apparatus and a polishing method using the apparatus in which an elastic portion is interposed between a polishing table and a polishing cloth, and the second elastic body is used in the polishing cloth.

REFERENCES:
patent: 526137 (1894-09-01), Winslow
patent: 3201904 (1965-08-01), Evans et al.
patent: 4458454 (1984-07-01), Barnett
patent: 4979337 (1990-12-01), Duppstadt

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