Polishing apparatus and polishing method

Details Polishing apparatus and polishing method Polishing apparatus and polishing method

2008-10-29

2011-12-13

Chaki, Kakali (Department: 2122)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S164000

Reexamination Certificate

active

08078306

ABSTRACT:
An apparatus polishes an object material such as a film on a substrate. This apparatus includes a polishing table for holding a polishing pad having a polishing surface, a motor configured to drive the polishing table, a holding mechanism configured to hold a substrate having an object material to be polished and to press the substrate against the polishing surface, a dresser configured to dress the polishing surface, and a monitoring unit configured to monitor a removal amount of the object material. The monitoring unit is operable to calculate the removal amount of the object material using a model equation containing a variable representing an integrated value of a torque current of the motor when polishing the object material and a variable representing a cumulative operating time of the dresser.

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