Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-04-18
2008-11-11
Rachuba, Maurina (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S041000
Reexamination Certificate
active
07448940
ABSTRACT:
A polishing apparatus comprises a first polishing table having a first polishing surface, a substrate carrier for holding a substrate and positioning the substrate so as to bring a surface of the substrate into contact with the first polishing surface, a pressing mechanism for pressing, against the first polishing surface, the surface of the substrate which has been brought into contact with the first polishing surface by the substrate carrier, a retainer ring mounted on the substrate carrier so as to surround the substrate which has been pressed against the first polishing surface by the pressing mechanism, and a retainer-ring-position-adjustment mechanism for adjustably positioning the retainer ring relative to the substrate, which has been pressed against the first polishing surface, in directions toward and away from the first polishing surface.
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European Search Report issued Jun. 20, 2008 in European Application No. 02730744.6 which is a foreign counterpart of the present application.
Ebara Corporation
Rachuba Maurina
Wenderoth , Lind & Ponack, L.L.P.
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