Polishing apparatus and polishing method

Details Polishing apparatus and polishing method Polishing apparatus and polishing method

1998-10-30

2000-11-07

Eley, Timothy V.

Abrading

Machine

Combined

356381, B24B 700

Patent

active

061428558

ABSTRACT:
In order to measure a thickness of a surface to be polished of a material to be polished for a short time, two-dimensional images are obtained from a light reflected from the surface to be polished of the material to be polished, a location at which a thickness is to be observed is specified by the obtained two-dimensional images, and thickness measurement is carried out.

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patent: 5747813 (1998-05-01), Norton et al.
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5899792 (1999-05-01), Yagi
patent: 6004187 (1999-12-01), Nyui et al.

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