Abrading – Abrading process – Abradant supplying
Reexamination Certificate
2007-03-27
2007-03-27
Nguyen, Dung Van (Department: 3723)
Abrading
Abrading process
Abradant supplying
C451S041000, C451S285000
Reexamination Certificate
active
11443390
ABSTRACT:
The polishing apparatus is capable of changing a pH value of slurry to adjust polishing rate and polishing a work piece with high flatness. The polishing apparatus comprises: a pressure vessel; a polishing plate provided in the pressure vessel; a pressing plate pressing a work piece onto the polishing plate; a driving unit relatively moving the polishing plate with respect to the pressing plate so as to polish the work piece; a gas supplying source supplying an alkaline gas or an acid gas into the pressure vessel; a gas discharging section discharging the supplied gas from the pressure vessel; and a slurry supplying unit supplying slurry onto the polishing plate. A pH value of the slurry is adjusted by dissolving the alkaline gas or the acid gas in the slurry.
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U.S. Appl. No. 10/303,156, filed Nov. 22, 2002, Doy.
DeNardis Darren
Doi Toshiro
Philipossian Ara
Doi Toshiro
Fujikoshi Machinery Corp.
Jordan and Hamburg LLP
Nguyen Dung Van
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