Polishing apparatus and method

Details Polishing apparatus and method Polishing apparatus and method

2005-02-22

2005-02-22

Shakeri, Hadi (Department: 3723)

Abrading

Abrading process

Utilizing fluent abradant

C451S060000, C451S160000, C451S285000, C451S314000, C438S692000, C156S345120

Reexamination Certificate

active

06857940

ABSTRACT:
A polishing method with a polishing apparatus includes an electrode constituted as a plurality of electrode elements, a device of driving the electrode, and dielectric abrasive particles disposed between the electrode and a workpiece. Polishing pressure is applied to the particles by a Coulomb force generated when an alternating-current voltage is applied to the electrode.

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