Polishing apparatus

Details Polishing apparatus Polishing apparatus

1994-09-20

1997-04-01

Smith, James G.

Abrading

Precision device or process - or with condition responsive...

451 5, 451285, B24B 4900, B24B 5100

Patent

active

056160631

ABSTRACT:
A polishing apparatus is a cluster type of apparatus having a plurality of units which perform various operations. The polishing apparatus includes a universal transfer robot having at least one arm for transferring a workpiece, a plurality of units disposed around the universal transfer robot and including a loading unit for receiving the workpiece to be polished, at least one polishing unit for polishing the workpiece, at least one washing unit for washing the workpiece which has been polished and an unloading unit for receiving the cleaned workpiece. Discrete mechanisms respectively transfer a clean workpiece and a dirty workpiece amongst the units.

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patent: 5333413 (1994-08-01), Hashimoto
patent: 5361545 (1994-11-01), Nakamura
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