Polishing apparatus

Details Polishing apparatus Polishing apparatus

1990-04-16

1991-10-08

Rachuba, M.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

5116577, 51240R, 269 55, B24B 4900

Patent

active

050542443

ABSTRACT:
A polishing apparatus comprising a tool for polishing a surface of a workpiece, a table for supporting a workpiece, a piezoelectric element for minutely driving the table, a load detector for detecting the load applied from the tool to the workpiece supported on the table, and a load controller for controlling the drive means in accordance with the load detected by the detector. The piezoelectric element moves the table minutely in the same direction as, or the direction opposite to, the direction in which said tool applies a load to the workpiece.

REFERENCES:
Proceeding of Japan Society of Precision Engineering (1989), 1139; H. Suzuki et al.; Mar. 24 (1989).

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