Polishing apparatus

Details Polishing apparatus Polishing apparatus

1996-07-18

1998-02-10

Rose, Robert A.

Abrading

Accessory

Dressing

451 41, 451 60, 451285, 451286, 451287, 451288, 451289, 451290, B24B 2118

Patent

active

057162646

ABSTRACT:
A polishing apparatus is employed to polish an object to be polished by urging the surface of the object to be polished against the surface of a polishing cloth and causing a relative movement therebetween, while supplying a polishing liquid into an area between the object to be polished and the polishing cloth. A plurality of nozzles spray respective fluid jets to strike against the surface of the cloth. The plurality of nozzles include more than one type of nozzle which vary flow velocity, flow rate, angle of spray, and cross-sectional configuration of a jet. The plurality of nozzles have axes positioned at a location at different distances from the rotation axis of the polishing cloth.

REFERENCES:
patent: 4680893 (1987-07-01), Cronkhite et al.
patent: 5154021 (1992-10-01), Bombardier et al.
patent: 5384986 (1995-01-01), Hirose et al.
patent: 5531635 (1996-07-01), Mogi et al.
patent: 5558110 (1996-09-01), Williford
patent: 5578529 (1996-11-01), Mullins

Affiliated with

Also associated with

Rating

Polishing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2072933