Abrading – Machine – Rotary tool
Patent
1997-02-05
1998-11-24
Eley, Timothy V.
Abrading
Machine
Rotary tool
451287, B24B 500, B24B 2900
Patent
active
058399470
ABSTRACT:
A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a turntable having a polishing surface thereon, a top ring, for holding a workpiece to be polished and pressing the workpiece against the polishing surface, which is movable between a polishing position inside of the turntable and a standby position outside of the turntable, and a first device for keeping at least a lower surface of the top ring wet while the top ring is in the standby position. The polishing apparatus further includes a dressing tool for dressing the polishing surface on the turntable, and a second device for keeping at least a lower surface of the dressing tool wet while the dressing tool is in a standby position.
REFERENCES:
patent: 4193226 (1980-03-01), Gill, Jr. et al.
patent: 4607496 (1986-08-01), Nagaura
patent: 4892669 (1990-01-01), Marcora et al.
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5333413 (1994-08-01), Hashimoto
patent: 5384986 (1995-01-01), Hirose et al.
patent: 5455080 (1995-10-01), Ooij
patent: 5491185 (1996-02-01), Hegedus et al.
patent: 5498481 (1996-03-01), Ooij
patent: 5527424 (1996-06-01), Mullins
patent: 5545076 (1996-08-01), Yun et al.
patent: 5578529 (1996-11-01), Mullins
patent: 5616063 (1997-04-01), Okumura et al.
patent: 5643067 (1997-07-01), Katsuoka et al.
patent: 5651725 (1997-07-01), Kikuta et al.
patent: 5653623 (1997-08-01), Kimura et al.
Katsuoka Seiji
Kimura Norio
Nishi Toyomi
Sakurai Kunihiko
Togawa Tetsuji
Banks Derris H.
Ebara Corporation
Eley Timothy V.
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