Polishing apparatus

Details Polishing apparatus Polishing apparatus

1996-07-19

1998-10-27

Eley, Timothy V.

Abrading

Machine

Rotary reciprocating tool

451127, 451 58, B24B 700

Patent

active

058271155

ABSTRACT:
A polishing apparatus for polishing a workpiece such as a semiconductor wafer to a flat mirror finish includes a rotary drum provided on a surface thereof with a polishing pad. A stand supports the workpiece to be polished. A controlling device controls reciprocation of the drum and rotation of the workpiece to obtain a relationship:

REFERENCES:
patent: 1887692 (1932-11-01), Driver
patent: 2145980 (1939-02-01), Hadwiger et al.
patent: 3943666 (1976-03-01), Dion et al.
patent: 4471582 (1984-09-01), Neary
patent: 4837985 (1989-06-01), Mayama
patent: 5486134 (1996-01-01), Jones et al.

Affiliated with

Also associated with

Rating

Polishing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1609520