Polishing apparatus

Details Polishing apparatus Polishing apparatus

1989-08-29

1990-09-18

Smith, James G.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51 55, 51124L, 51284R, B24B 4900

Patent

active

049569449

ABSTRACT:
A polishing apparatus for polishing a surface of a work piece requiring high surface precision such as an optical component or a metal mold by applying a tool, in which the tool is given a rocking motion of the surface of work to be polished while the work is given a rotary motion. Besides the rotary motion of the work, the rotation and rocking motion of the tool and the movement of the tool on the surface to be polished are detected and are controlled according to the working information for the surface to be polished.

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patent: 3564776 (1971-02-01), Aspden
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patent: 4161847 (1979-07-01), Whang
patent: 4173848 (1979-11-01), Ikeno
patent: 4493168 (1985-01-01), Field
patent: 4584799 (1986-04-01), Juvet

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