Polishing apparatus

Details Polishing apparatus Polishing apparatus

1995-12-28

1997-07-15

Little, Willis

Abrading

Machine

Rotary tool

451287, 451288, 269236, B24B 500

Patent

active

056477929

ABSTRACT:
A polishing apparatus has a cloth cartridge detachably mounted on a turntable, an abrasive liquid nozzle for supplying an abrasive liquid onto an abrasive cloth of the cloth cartridge, and a top ring for holding a workpiece against the abrasive cloth. The turntable and the top ring are rotatable relatively to each other while the abrasive liquid is being supplied onto the abrasive cloth from the abrasive liquid nozzle and the workpiece is being held against the abrasive cloth. A cartridge tightener which is angularly movably mounted on the turntable has a tapered surface for engaging an engageable surface of the cloth cartridge in response to angular movement of the cartridge tightener. The tapered surface is included to a plane substantially perpendicular to an axis about which the turntable is rotatable. The cartridge tightener also has a resilient member acting between the tapered surface and the turntable and elastically deformable for applying resilient forces between the tapered surface and the engageable surface in response to angular movement of the cartridge tightener.

REFERENCES:
patent: 3968598 (1976-07-01), Ogawa
patent: 4206910 (1980-06-01), Biesemeyer
patent: 4527358 (1985-07-01), Day
patent: 5310455 (1994-05-01), Pasch et al.

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