Abrading – Machine – Rotary tool
Patent
1997-02-26
1999-08-10
Rose, Robert A.
Abrading
Machine
Rotary tool
451 41, 451286, 451289, 451287, 414749, 414936, B24B 1305
Patent
active
059349840
ABSTRACT:
A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus has a pusher for transferring the workpiece between a top ring of a polishing apparatus and the pusher. The polishing apparatus includes a turntable having a polishing surface, a top ring for supporting the workpiece to be polished and pressing the workpiece against the polishing surface, and a pusher for transferring the workpiece between the top ring and the pusher. The pusher comprises a workpiece support for supporting the workpiece, an actuating unit for moving the workpiece support in a vertical direction, a sliding mechanism movable within a horizontal plane, and a positioning mechanism for positioning the workpiece support and the top ring with respect to each other in association with the sliding mechanism when the workpiece is transferred between the workpiece support and the top ring.
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Kojima Shunichiro
Togawa Tetsuji
Ebara Corporation
Nguyen George
Rose Robert A.
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