Polishing apparatus

Details Polishing apparatus Polishing apparatus

2007-07-20

2008-12-16

Shakeri, Hadi (Department: 3723)

Abrading

Machine

Rotary tool

C451S060000, C451S446000

Reexamination Certificate

active

07465221

ABSTRACT:
A first supply unit sprays and supplies abrasive slurry containing abrasive grains into a mixing unit. A second supply unit sprays and supplies additive into the mixing unit. A third supply unit sprays and supplies pure water into the mixing unit. The mixing unit mixes the mist of abrasive slurry, the mist of additive and the mist of pure water to prepare polishing solution, and supplies the polishing solution onto the major surface of a polishing stage.

REFERENCES:
patent: 3979239 (1976-09-01), Walsh
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5643406 (1997-07-01), Shimomura et al.
patent: 5679063 (1997-10-01), Kimura et al.
patent: 5716264 (1998-02-01), Kimura et al.
patent: 5857893 (1999-01-01), Olsen et al.
patent: 5885134 (1999-03-01), Shibata et al.
patent: 5997392 (1999-12-01), Chamberlin et al.
patent: 6048256 (2000-04-01), Obeng et al.
patent: 6059920 (2000-05-01), Nojo et al.
patent: 6123602 (2000-09-01), Rodriguez et al.
patent: 6241581 (2001-06-01), Miyashita et al.
patent: 6283835 (2001-09-01), Harada et al.
patent: 6293849 (2001-09-01), Kawashima
patent: 9-148286 (1987-06-01), None
patent: 9-199455 (1997-07-01), None
patent: 10-202525 (1998-08-01), None
patent: 2000-117636 (2000-04-01), None

Affiliated with

Also associated with

Rating

Polishing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polishing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polishing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4022226