Polishing apparatus

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder

Reexamination Certificate

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Details

C451S036000, C451S285000, C438S692000

Reexamination Certificate

active

11392697

ABSTRACT:
The polishing apparatus is capable of transferring a work piece to a top ring without moving the work piece from the center and capable of precisely polishing the work piece. The polishing apparatus has a transfer unit for transferring the work piece to the top ring. The transfer unit comprises: a guide member having a receiving section, which centers the work piece; a mounting table vertically moving with respect to the guide member, the mounting table having a mounting section, which receives the centered work piece; and a supporting mechanism supporting the mounting table and allowing the mounting table to move downward. The mounting table is relatively moved close to the top ring and presses the work piece onto the top ring so as to transfer the work piece to the top ring.

REFERENCES:
patent: 6431949 (2002-08-01), Ishikawa et al.
patent: 6439971 (2002-08-01), Okumura et al.
patent: 6609950 (2003-08-01), Kimura et al.
patent: 6846224 (2005-01-01), Ki
patent: 2002/0124373 (2002-09-01), Katsuoka et al.
patent: 2004/0127142 (2004-07-01), Olgado
patent: 0347718 (1989-12-01), None
patent: 0911114 (1999-04-01), None
patent: 11-347992 (1999-12-01), None

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