Polishing apparatus

Details Polishing apparatus Polishing apparatus

2006-02-21

2006-02-21

Shakeri, Hadi (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

By optical sensor

C451S009000, C451S011000, C451S261000, C451S269000

Reexamination Certificate

active

07001244

ABSTRACT:
A polishing apparatus is provided for accurately detecting the relative displacement between an upper wheel and a lower wheel and thus for reliably polishing workpieces to a desired thickness. The polishing apparatus includes an upper wheel for pressing at least one workpiece, a lower wheel for supporting the workpiece, non-contact-type displacement-detection device for detecting the relative displacement between the upper wheel and the lower wheel, and a reference table for providing a displacement-detection reference position. The non-contact-type displacement-detection device is joined to the upper wheel so as to move therewith. The reference table is disposed at a position opposing the displacement-detection device and also is integrally connected to the lower wheel.

REFERENCES:
patent: 4433510 (1984-02-01), Katagiri et al.
patent: 4524547 (1985-06-01), Heaston et al.
patent: 5088239 (1992-02-01), Osman
patent: 5969521 (1999-10-01), Kurita et al.
patent: 11-77521 (1999-03-01), None

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