Polishing apparatus

Details Polishing apparatus Polishing apparatus

2006-08-01

2006-08-01

Rachuba, M. (Department: 3723)

Abrading

Machine

Rotary tool

C451S443000, C451S444000

Reexamination Certificate

active

07083506

ABSTRACT:
A polishing apparatus comprises a polishing table having a polishing surface thereon, a top ring for pressing a workpiece to be polished against the polishing surface, and a dresser for dressing the polishing surface on the polishing table. The dresser comprises a dressing element provided on a surface of the dresser for dressing the polishing surface by sliding contact with the polishing surface, and an ejection nozzle provided on the surface of the dresser for ejecting a fluid supplied from a fluid source toward the polishing surface.

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