Polishing apparatus

Details Polishing apparatus Polishing apparatus

2006-10-03

2006-10-03

Rose, Robert A. (Department: 3723)

Abrading

Machine

Rotary tool

C451S287000, C451S290000

Reexamination Certificate

active

07115026

ABSTRACT:
An upper polishing plate is moved downward until facing a lower polishing plate to polish a work piece. The upper polishing plate is rotated in a horizontal plane together with a first elastic member, a second elastic member, an outer member and a connecting member. A pressure difference between a first pressing force pressing the outer member or an inner member upward and a second pressing force pressing the outer member or the inner member downward, which is produced in a first closed space by supplying a compressed fluid into and discharging the same from the first closed space, is adjusted, so that a third pressing force of the upper polishing plate, which presses a work piece, can be adjusted.

REFERENCES:
patent: 2963830 (1960-12-01), Hook
patent: 3848365 (1974-11-01), Bovensiepen et al.
patent: 4315383 (1982-02-01), Day
patent: 4593495 (1986-06-01), Kawakami et al.
patent: 5099614 (1992-03-01), Arai et al.
patent: 5595529 (1997-01-01), Cesna et al.
patent: 5697832 (1997-12-01), Greenlaw et al.
patent: 11-48126 (1999-02-01), None

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