Polishing apparatus

Details Polishing apparatus Polishing apparatus

2005-11-29

2005-11-29

Hail, III, Joseph J. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S056000, C451S285000, C451S286000, C451S287000, C451S288000, C451S443000, C451S444000

Reexamination Certificate

active

06969305

ABSTRACT:
A polishing apparatus for polishing a substrate comprises a turntable having a polishing surface, a substrate holder for holding a substrate and bringing the substrate into contact under pressure with the polishing surface, a dresser including a dresser tool adapted to be brought into contact under a pressure with the polishing surface to dress or condition the polishing surface and a pressure device connected to the dresser for moving the dresser between a raised position where the dresser is spaced away from the polishing surface and a dressing position where the dresser rests on the polishing surface such that the dresser tool is in contact with the polishing surface under a pressure exerted by the weight of the dresser itself, the dresser comprising a follow-up mechanism allowing each one of dressing element to move up and down relative to a flange portion so as to follow a contour of the polishing surface of the turntable.

REFERENCES:
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patent: 5885137 (1999-03-01), Ploessl
patent: 6033290 (2000-03-01), Gurusamy et al.
patent: 6123607 (2000-09-01), Ravkin et al.
patent: 6306008 (2001-10-01), Moore
patent: 6514126 (2003-02-01), Vanell
patent: 6531399 (2003-03-01), Kojima et al.
patent: 6572446 (2003-06-01), Osterheld et al.
patent: 6607426 (2003-08-01), Suzuki
patent: 0816017 (1998-01-01), None
patent: 2001-246550 (2001-09-01), None

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