Polishing aparatus and method

Details Polishing aparatus and method Polishing aparatus and method

1995-11-28

1997-10-21

Rose, Robert A.

Abrading

Abrading process

Glass or stone abrading

451285, 451286, 451287, 451288, 451290, B24B 100

Patent

active

056790597

ABSTRACT:
A polishing apparatus for polishing a surface of a workpiece includes a housing unit, a partition wall partitioning an interior of the housing unit into a first chamber and a second chamber, a polishing section disposed in the first chamber and having a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring positioned above the turntable for supporting the workpiece to be polished and pressing the workpiece against the abrasive cloth, and a cleaning section disposed in the second chamber and cleaning the workpiece which has been polished. The polishing apparatus further includes a transferring device for transferring the workpiece which has been polished from the polishing section to the cleaning section through an opening and an exhaust system for exhausting ambient air from each of the polishing section and cleaning section separately and independently.

REFERENCES:
patent: 4050954 (1977-09-01), Basi
patent: 4838150 (1989-06-01), Suzuki et al.
patent: 5096477 (1992-03-01), Shinoda et al.
patent: 5299584 (1994-04-01), Miyazaki et al.
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5425793 (1995-06-01), Mori et al.
patent: 5431600 (1995-07-01), Murata et al.

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