Fishing – trapping – and vermin destroying
Patent
1994-06-22
1995-01-31
Fourson, George
Fishing, trapping, and vermin destroying
437236, 437228, 156636, H01L 2128, H01L 21304
Patent
active
053858662
ABSTRACT:
Polishing of a non-planar surface layer on a semiconductor substrate is conducted by providing an oxidized boron nitride polish stop layer on the semiconductor substrate, forming the non-planar surface layer on the oxidized boron nitride polish stop layer, the oxidized boron nitride polish stop layer being polish selective relative to the non-planar surface layer, and polishing the non-planar surface layer until the oxidized boron nitride polish stop layer is reached.
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IBM TDB entitled "Improved Isolation and Gate Level Formation Process", by H. Ng, et al., No. 11, 04-92, pp. 197-199, Apr. 1992.
Bilodeau Thomas G.
Fourson George
International Business Machines - Corporation
Lau Richard
LandOfFree
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