Pole measuring method

Details Pole measuring method Pole measuring method

2005-08-30

2005-08-30

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S070000, C378S071000, C378S073000, C378S086000

Reexamination Certificate

active

06937694

ABSTRACT:
A method for measuring a pole of a sample, using a reflection method, is effective substantially over all measurement regions ranging from the region of high-tilting-angle α of a conventional pole measuring to the in-plane diffraction region corresponding to low-tilting-angle α.

REFERENCES:
patent: 2001-56304 (2001-02-01), None
Nov. 11, 1998 Grazing Incidence In-Plane Diffractometer for Thin-Films Kazuhiko Omote et al. X-sen Bunseki no Shinpo vol. 30 pp. 205-218.
1999 Dai 50 kai Sosei Kako Rengo Kouenkai Kouen Ronbunshuu, (Japan) pp. 35-36.

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