Optics: measuring and testing – By polarized light examination
Reexamination Certificate
2006-06-13
2006-06-13
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
By polarized light examination
Reexamination Certificate
active
07061613
ABSTRACT:
An ellipsometer with a variable retarder, which introduces a spatial dependence in the beam, includes a polarizing beam splitter to produce two beams with orthogonal polarization states. The beam splitter may be, e.g., a polarizing displacer or polarizing beam splitter. The intensities of the two beams are measured, e.g., using separate detectors or separate detector elements in an array. The intensity from the two beams may be summed and used as a reference to normalize intensity of the produced beam.
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Huang Chunsheng
Poris Jaime
Rovira Pablo I.
Akanbi Isiaka O.
Nanometrics Incorporated
Silicon Valley Patent & Group LLP
Toatley Jr. Gregory J
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