Polarizer for high-power deep UV radiation

Details Polarizer for high-power deep UV radiation Polarizer for high-power deep UV radiation

2006-10-10

2006-10-10

Lavarias, Arnel C. (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

Having polarizing element

C359S487030, C359S629000, C359S490020

Reexamination Certificate

active

07119951

ABSTRACT:
A polarizing effect is achieved for light having wavelengths less than 250 nm by orienting an antireflector at an incidence angle between 65° and 75°. Despite limited choices for materials, the antireflector is constructed of layers that alternate in refractive index to exploit the mechanism of interference for limiting the reflectivity of one linear polarization component of the light. The same combination of layers supports the reflectivity of an orthogonal linear polarization component. The light reflected from the antireflector is highly polarized.

REFERENCES:
patent: 2403731 (1946-07-01), MacNeille
patent: 5339441 (1994-08-01), Kardos et al.
patent: 5683480 (1997-11-01), Taniguchi
patent: 6574039 (2003-06-01), Murata et al.
patent: 6697194 (2004-02-01), Kuschnereit et al.
patent: 2004/0252369 (2004-12-01), Wilklow
Thin Film Optical Filters, 2ndEd. Angus Macleod, Macmillan Co. NYC 1986, p. 332 description of thin film plate polarizers.
Concepts of Classical Optics, John Strong, Freeman & Co, San Franciscio 1958, p. 122 description of “pile of plates” polarizer.

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