Polarized radiation in lithographic apparatus and device...

Details Polarized radiation in lithographic apparatus and device... Polarized radiation in lithographic apparatus and device...

2005-04-08

2008-03-18

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S069000

Reexamination Certificate

active

07345740

ABSTRACT:
A lithographic apparatus uses polarized light to improve the imaging properties such as exposure latitude, while maintaining and extending the lifetime of an illumination system in a lithographic apparatus.

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European Search Report issued in EP 05 25 7710 dated May 11, 2006.
English translation of Korean Office Action issued in Korean Application No. 10-2005-0132116 dated Dec. 8, 2006.

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