Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-04-19
2011-04-19
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S067000
Reexamination Certificate
active
07929116
ABSTRACT:
A lithographic apparatus uses polarized light to improve the imaging properties such as exposure latitude, while maintaining and extending the lifetime of an illumination system in a lithographic apparatus.
REFERENCES:
patent: 5459000 (1995-10-01), Unno
patent: 6392800 (2002-05-01), Schuster
patent: 6965484 (2005-11-01), Shaver
patent: 6970233 (2005-11-01), Blatchford
patent: 7084960 (2006-08-01), Schenker et al.
patent: 7312852 (2007-12-01), Wagner et al.
patent: 7345740 (2008-03-01), Wagner et al.
patent: 7375799 (2008-05-01), Van De Kerkhof et al.
patent: 7408616 (2008-08-01), Gruner et al.
patent: 2001/0012154 (2001-08-01), Schuster
patent: 2001/0019404 (2001-09-01), Schuster et al.
patent: 2004/0057036 (2004-03-01), Kawashima et al.
patent: 2005/0128458 (2005-06-01), Blatchford
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0264885 (2005-12-01), Albert
patent: 2006/0092398 (2006-05-01), McCarthy
patent: 2006/0146384 (2006-07-01), Schultz et al.
patent: 0 969 327 (2000-01-01), None
patent: 06-053120 (1994-02-01), None
patent: 6-118623 (1994-04-01), None
patent: 6-124872 (1994-05-01), None
patent: 6-181167 (1994-06-01), None
patent: 9-199394 (1997-07-01), None
patent: 2004/111678 (2004-04-01), None
European Search Report issued in EP 05 25 7710 dated May 11, 2006.
English translation of Korean Office Action issued in Korean Application No. 10-2005-0132116 dated Dec. 8, 2006.
English Translation of Japanese Official Action issued on Nov. 25, 2008 in Japanese Application No. 2005-375578.
Chinese Office Action for Chinese Application No. 200510003503.5 dated Jun. 12, 2009.
De Boeij Wilhelmus Petrus
De Jonge Roel
Fiolka Damian
Heil Tilmann
Wagner Christian
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Polarized radiation in lithographic apparatus and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Polarized radiation in lithographic apparatus and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polarized radiation in lithographic apparatus and device... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2716340