Illumination – With polarizer
Patent
1997-09-12
1999-08-10
Sember, Thomas M.
Illumination
With polarizer
362268, 430 20, 430 22, 439124, 359487, G02B 530
Patent
active
059347805
ABSTRACT:
A polarized light irradiation device in which formation of an alignment layer of a liquid crystal cell element is enabled by optical alignment is obtained by the fact that light which contains UV light and which is emitted from a discharge lamp is focused by an oval focusing mirror and is reflected by a first flat mirror. This light is incident via a shutter on an integrator lens. The light emerging from the integrator lens is reflected by a second flat mirror and is converted into parallel light by a collimation lens, and is incident in the polarization element. In the polarization element, there are several glass plates spaced parallel to one another and inclined by the Brewster angle relative to the incident light. The polarization element transmits the P-polarized light and reflects the S-polarized light for the most part. The P-polarized light which has emerged from the polarization element irradiates a workpiece via a mask.
REFERENCES:
patent: 5535054 (1996-07-01), Shibuya
patent: 5674650 (1997-10-01), Dirksen et al.
patent: 5748369 (1998-05-01), Yokota
patent: 5827629 (1998-10-01), Miyatake
Safran David S.
Sember Thomas M.
Ushiodenki Kabushiki Kaisha
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