Polarization modulator

Details Polarization modulator Polarization modulator

2007-01-02

2007-01-02

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C250S227170

Reexamination Certificate

active

10824305

ABSTRACT:
Systems and techniques for changing a polarization profile of light to a desired polarization profile. In some implementations, a polarization modulator is in communication with a stress modulator. The polarization modulator alters the polarization profile of light in response to applied stress from the stress modulator.

REFERENCES:
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patent: 2003/0072079 (2003-04-01), Silverstein et al.
Konstantinos Adam et al., “Polarization Effects in Immersion Lithography”, Optical Mecrolithography XVII, Proceedings of SPIE vol. 5377, pp. 329-343, 2004.
Richard Schenker et al., “Material Limitations to 193-nm Lithographic System Lifetimes”, SPIE vol. 2726, pp. 698-706.
Richard E. Schenker et al., “Ultraviolet-induced densification in fused silica”, J. Appl. Phys. 82 (3), Aug. 1, 1997, pp. 1065-1071.
G. de Zwart et al., “Performance of a Step and Scan System for DUV Lithography”, SPIE vol. 3051, pp. 817-830.
U.S. Appl. No. 10/813,453, filed Mar. 29, 2004, “Lithography Using Controlled Polarization”.

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