Polarization modulation imaging ellipsometer

Details Polarization modulation imaging ellipsometer Polarization modulation imaging ellipsometer

2007-04-16

2010-02-16

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By polarized light examination

C250S225000

Reexamination Certificate

active

07663752

ABSTRACT:
A polarization modulation imaging ellipsometer capable of measuring ellipsometric parameters of the surface of a sample for each of the measured points with high precision and at high speed, which has a light source unit that emits light whose intensity periodically changes at a predetermined frequency; an incident-light optical unit having a collimator, a polarizer, and a photoelastic phase modulator which modulates light emitted from the light source unit an emitted-light optical unit having an analyzer which analyzes a polarization state of light that has been reflected from or transmitted through the sample and a two-dimensional detector which converts light received from the analyzer to an electrical signal and outputs the electrical signal; and a control/analysis unit which operates the light source unit and the photoelastic phase modulator at the same frequency, and calculates ellipsometric parameters of each of the measured points.

REFERENCES:
patent: 5076696 (1991-12-01), Cohn et al.
patent: 5657126 (1997-08-01), Ducharme et al.
patent: 5956145 (1999-09-01), Green et al.
patent: 5956147 (1999-09-01), Jellison et al.
patent: 6483584 (2002-11-01), Lee et al.
patent: 6590667 (2003-07-01), Lee et al.
D. Beaglehole, “Performance of a microscopic imaging ellipsometer”, Rev. Sci. Instrum., 59f2557(1988).
S. N. Jasperson, et al., “An Improved Method for High Reflectivity Ellipsometry Based on a New Polarization Modulation Technique”, Rev. Sci. Instrum., 40, 761(1969).
B. Drevillon, et al., “Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysis”, Rev. Sci. Instrum., 53, 969(1982).
P. Gleyzes, et al., “Profilometrie Picometrique. II. L'Approche Multi-Detecteur et la Detection Synghrone Multiplexee”, J. Optics, 26, 251(1995).
A. Dubois, et al., “Real-time reflectivity and topography imagery of depth -resolved microscopic surfaces”, Opt. Lett., 24, 309(1999).
M. Akiba, et al., “Full-field optical coherence topography by two-dimensional heterodyne detection with a pair of CCD cameras”, Opt. Lett., 28, 816(2003).
Shigeru Ando, et al., “Correlation Image Sensor: Two-Dimensional Matched Detection of Amplitude—Modulated Light”, IEEE Trans. Electron Devices, 50, 2059 (2003).
Toru Kurihara, et al., “Real-Time Imaging Ellipsometer Using Three-Phase Correlation Image Sensor”, Proc. 20th Sensor Symp., pp. 241-244, Tokyo, 2003.
0. Acher, et al., “Improvements of phase-modulated ellipsometry”, Rev. Sci. Instrum., 60, 65(1989).
Gerald E. Jellison, et al., “Two-channel polarization modulation ellipsometer”, Appl. Opt., 29, 959(1990).
Takaaki Shimizu, et al., “Ellip some trie Imager Using Correlation Image Sensor and Rotating Polarizer”, Proc. Japan Society of Applied Physics, Spring Meeting 2003, 29 p-YS-6, 2003.

Affiliated with

Also associated with

Rating

Polarization modulation imaging ellipsometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Polarization modulation imaging ellipsometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Polarization modulation imaging ellipsometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4200723