Polarization effect averaging

Details Polarization effect averaging Polarization effect averaging

2007-02-20

2007-02-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Using fiber or waveguide interferometer

C356S492000, C356S073100

Reexamination Certificate

active

10462341

ABSTRACT:
In order to reduce polarization dependent error, the polarization state of incident light is set to at least two different states of polarization, and a first optical property is determined separately for each of said at least two states of polarization. Then, an averaging procedure is carried out in order to obtain a mean value of the first optical property or of a property derived therefrom. Alternatively, the averaging procedure can be performed with respect to a DUT property of a device under test that is determined as a function of said first optical property.

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European Search Report, Application No. EP 02 01 8761, dated Feb. 17, 2003.

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