Polar-coordinate manipulator for vacuum application

Details Polar-coordinate manipulator for vacuum application Polar-coordinate manipulator for vacuum application

1988-01-13

1988-11-01

Spar, Robert J.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

74 182, 74 8915, 74479, 901 17, B65G 5400

Patent

active

047815205

ABSTRACT:
A polar-coordinate manipulator for vacuum application, e.g., for positioning of a specimen (S) between several operating positions in a vacuum chamber (16) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures. The device comprises a circular stationary support (12) attached to the flange of vacuum chamber (16). A square-shaped rotary table (22) is rotatingly supported by a circular support (22) and in turn slidingly supports a sliding block (44). The sliding block can be shifted by a micrometer (50) radially with respect to the axis of rotation of the turntable. The sliding block supports a moveable plate (72) which can be shifted along the above-mentioned axis of rotation and carries a rigidly attached rod (92) which penetrates into the vacuum chamber and supports the sample to be treated. The manipulator can position the sample at a target point in a polar coordinate system.

REFERENCES:
patent: 3625378 (1971-12-01), Attiz
patent: 4030615 (1977-06-01), Guggi et al.
patent: 4128019 (1978-12-01), Kupka
patent: 4502830 (1985-03-01), Inaba et al.

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