Optical: systems and elements – Optical modulator – Light wave directional modulation
Reexamination Certificate
2005-10-25
2005-10-25
Dang, Hung Xuan (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave directional modulation
C359S290000, C359S292000, C359S295000, C359S224200, C359S230000
Reexamination Certificate
active
06958850
ABSTRACT:
The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk. An application Specific Integrated Circuit (ASIC) can be used to control the detection and drive of the mirrors.
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Mastrangelo Carlos Horacio
Sane Harshad Shrikrishna
Yazdi Navid
Corning Incorporated
Dang Hung Xuan
Tra Tuyen
Wilmer Cutler Pickering Hale and Dorr LLP
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