Pointing angle control of electrostatic micro mirrors

Details Pointing angle control of electrostatic micro mirrors Pointing angle control of electrostatic micro mirrors

2006-01-10

2006-01-10

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S291000, C359S237000

Reexamination Certificate

active

06985271

ABSTRACT:
The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk. An application Specific Integrated Circuit (ASIC) can be used to control the detection and drive of the mirrors.

REFERENCES:
patent: 5266115 (1993-11-01), Taccon et al.
patent: 5285379 (1994-02-01), Gamble
patent: 5331265 (1994-07-01), Torii et al.
patent: 5341078 (1994-08-01), Torii et al.
patent: 5371669 (1994-12-01), Venkataraman et al.
patent: 5384525 (1995-01-01), Kato
patent: 5388041 (1995-02-01), Carpita
patent: 5442270 (1995-08-01), Tetsuaki
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 6044705 (2000-04-01), Neukermans et al.
patent: 6046878 (2000-04-01), Liu et al.
patent: 6185467 (2001-02-01), Romano et al.
patent: 6275326 (2001-08-01), Bhalla et al.
patent: 6480645 (2002-11-01), Peale et al.
patent: 6538802 (2003-03-01), Wang et al.
patent: 2002/0176657 (2002-11-01), Burke et al.
patent: 2003/0174376 (2003-09-01), Sane et al.
DeCarlo, Raymond A. et al.,Proceedings of the IEEE, “Variable Structure Control of Nonlinear Multivariable Systems: A Tutorial”, 76(3):212-232, 1988.
Hung, John Y.,IEEE Transactions on Industrial Electronics, “Variable Structure Control: A Survey”, 40(1):2-22, 1993.
Yang, W. Q. et al.,IEEE Transactions on Aerospace and Electronic Systems, “Electrostatic Suspension System With Sliding Mode Control”, 28(2):605-609, 1992.
Young, David K., et al.,IEEE Transactions on Control Systems Technology, “A Control Engineer's Guide to Sliding Mode Control”, 7(3):328-342, 1999.

Affiliated with

Also associated with

Rating

Pointing angle control of electrostatic micro mirrors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pointing angle control of electrostatic micro mirrors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pointing angle control of electrostatic micro mirrors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3588490