Point scattering detector

Details Point scattering detector Point scattering detector

1978-03-10

1979-12-18

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250311, 250396R, G01N 2700

Patent

active

041796098

ABSTRACT:
A beam analyzing system using a point scattering detector in conjunction with the standard secondary electron collector and imaging system of a scanning electron microscope. The detector consists of a sharp metal (preferably tungsten) tip located centrally in a biased aperture assembly mounted in the specimen stage. By scanning the image within the aperture and collecting the secondary electrons scattered from a controlled region of the tip, the electron beam intensity can be obtained and reconstructed on a display screen.

REFERENCES:
patent: 2548870 (1951-04-01), Colterjohn
patent: 4086491 (1978-04-01), Vaughan

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