Point of use dilution tool and method

Details Point of use dilution tool and method Point of use dilution tool and method

1997-07-01

2000-06-06

Gulakowski, Randy

Cleaning and liquid contact with solids

Apparatus

With treating fluid purifying or separating means

134 50, 134 953, 134113, 134109, 134110, 134 952, B08B 300

Patent

active

060706007

ABSTRACT:
A dilution tool (100) and a method prepare a solution of two fluids for removing residue from a semiconductor wafer. The fluids are combined in a filter (130) to form the desired solution. Sealless pumps (141, 142) are driven by a common motor (143) to pump the fluids at a constant ratio of their respective flow rates while the flow rate of the solution varies. The conductivity of the solution is measured with a conductivity meter (166) to determine the concentration.

REFERENCES:
patent: 4899767 (1990-02-01), McConnell et al.
patent: 5407526 (1995-04-01), Danielson et al.
patent: 5487398 (1996-01-01), Ohmi et al.
patent: 5755614 (1998-05-01), Adams et al.
patent: 5878760 (1999-03-01), Mohindra et al.

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