Point-of-use ammonia purification for electronic component manuf

Details Point-of-use ammonia purification for electronic component manuf Point-of-use ammonia purification for electronic component manuf

1996-03-04

1998-05-26

Bhat, Nina

Distillation: processes, separatory

Distilling to separate or remove only water

From nitric acid

203 40, 423484, 423488, 202158, 202161, 202172, 202200, C01B 2144, B01D 300

Patent

active

057559341

ABSTRACT:
Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.

REFERENCES:
patent: 4940134 (1990-07-01), Aoki et al.
patent: 4953694 (1990-09-01), Hayashi et al.
patent: 5242468 (1993-09-01), Clark et al.
patent: 5445714 (1995-08-01), Myers
patent: 5496778 (1996-03-01), Hoffman et al.
patent: 5500098 (1996-03-01), Brown et al.
patent: 5512142 (1996-04-01), Hoiss
patent: 5558688 (1996-09-01), Cowan et al.

Affiliated with

Also associated with

Rating

Point-of-use ammonia purification for electronic component manuf does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Point-of-use ammonia purification for electronic component manuf, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Point-of-use ammonia purification for electronic component manuf will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1956252