Point-of-use ammonia purification for electronic component manuf

Details Point-of-use ammonia purification for electronic component manuf Point-of-use ammonia purification for electronic component manuf

1994-01-07

1996-03-05

Langel, Wayne

Fishing, trapping, and vermin destroying

29 2501, 55220, 95273, 95285, 203DIG16, 423352, 437225, C01C 100

Patent

active

054967783

ABSTRACT:
Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.

REFERENCES:
patent: 3679549 (1972-07-01), Newman et al.
patent: 3745748 (1973-07-01), Goldfield et al.
patent: 4075306 (1978-02-01), Muromura
patent: 4828660 (1989-05-01), Clark et al.
patent: 5242468 (1993-09-01), Clark et al.

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