Point-of-use ammonia purification for electronic component manuf

Details Point-of-use ammonia purification for electronic component manuf Point-of-use ammonia purification for electronic component manuf

1998-05-22

2000-01-18

Bhat, Nina

Distillation: processes, separatory

Distilling to separate or remove only water

From nitric acid

203 46, 95226, 95230, 423484, B01D 342, C01B 719

Patent

active

060154772

ABSTRACT:
Highly purified ammonia for use in processes for the production of high-precision electronic components is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.

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