Pod loader interface improved clean air system

Details Pod loader interface improved clean air system Pod loader interface improved clean air system

1998-02-01

1999-08-10

Joyce, Harold

Ventilation

Clean room

414416, 414811, B01L 104

Patent

active

059349913

ABSTRACT:
A fan is attached directly adjacent to a clean air filter sealing an air inlet under a horizontal portion of a plenum chamber below a vertically movable loading platform which all move as a unit. A vertical portion of the plenum chamber, trapezoidal in cross-section, communicates with a wafer pod on the loading platform through an angled perforated grill sealing an air outlet from the vertical portion of the plenum chamber. Clean air flows evenly throughout the entire height of an angled perforated grill over the surfaces of the wafers. Mechanisms lift the pod cover and load and unload the wafer carrier.

REFERENCES:
patent: 4904153 (1990-02-01), Iwasawa et al.
patent: 4927438 (1990-05-01), Mears et al.
patent: 4963069 (1990-10-01), Wurst et al.
patent: 5241758 (1993-09-01), Cruz et al.
patent: 5362274 (1994-11-01), Seiichiro

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